| 
			 Features  | 
			
			 Unit  | 
			
			 Product Indicator  | 
		
| 
			 Prefabricated parts specification  | 
			mm | ≤φ50 | 
| 
			 Diameter measurement  | 
			mm | φ5-φ40(diameter measuring instrument can be configured according to customer requirements) | 
| 
			 Diameter measurement accuracy  | 
			mm | ±0.05 | 
| 
			 Typical control accuracy during deposition  | 
			mm | 
			 Average diameter 0.15; Maximum diameter deviation: ± 0.25  | 
		
| 
			 Maximum end spacing of chuck  | 
			mm | 2100 | 
| 
			 Chuck through hole size  | 
			mm | φ110 | 
| 
			 Hot zone operating range  | 
			mm | 1600 | 
| 
			 Chuck clamping range  | 
			mm | φ10~φ125 | 
| 
			 Maximum rotating speed of chuck  | 
			r/min | 100 | 
| 
			 Moving speed of lamp holder  | 
			mm/min | 3~3000 | 
| 
			 Working temperature range  | 
			℃ | +1650~+2100 | 
| 
			 Temperature measurement range  | 
			℃ | +900~+2500 | 
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